1 Executive Summary
2 Preface
2.1 Abstract
2.2 Stake Holders
2.3 Research Scope
2.4 Research Methodology
2.4.1 Data Mining
2.4.2 Data Analysis
2.4.3 Data Validation
2.4.4 Research Approach
2.5 Research Sources
2.5.1 Primary Research Sources
2.5.2 Secondary Research Sources
2.5.3 Assumptions
3 Market Trend Analysis
3.1 Introduction
3.2 Drivers
3.3 Restraints
3.4 Opportunities
3.5 Threats
3.6 Application Analysis
3.7 End User Analysis
3.8 Emerging Markets
3.9 Impact of Covid-19
4 Porters Five Force Analysis
4.1 Bargaining power of suppliers
4.2 Bargaining power of buyers
4.3 Threat of substitutes
4.4 Threat of new entrants
4.5 Competitive rivalry
5 Global Remote Plasma Source Market, By Type
5.1 Introduction
5.2 Remote Plasma Cleaner
5.3 Remote Plasma Processor
5.4 Capacitively Coupled Plasma (CCP)
5.5 Inductively Coupled Plasma (ICP)
5.6 Remote Microwave Plasma
5.7 Other Types
6 Global Remote Plasma Source Market, By Application
6.1 Introduction
6.2 Semiconductor Manufacturing
6.3 Thin Film Deposition
6.4 Surface Treatment
6.5 CVD (Chemical Vapor Deposition)
6.6 ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition)
6.7 Etch
6.8 Other Applications
7 Global Remote Plasma Source Market, By End User
7.1 Introduction
7.2 Electronics & Semiconductor Industry
7.3 Healthcare Industry
7.4 Manufacturing Industry
7.5 Optics
7.6 Textile Industry
7.7 Chemical
7.8 Other End Users
8 Global Remote Plasma Source Market, By Geography
8.1 Introduction
8.2 North America
8.2.1 US
8.2.2 Canada
8.2.3 Mexico
8.3 Europe
8.3.1 Germany
8.3.2 UK
8.3.3 Italy
8.3.4 France
8.3.5 Spain
8.3.6 Rest of Europe
8.4 Asia Pacific
8.4.1 Japan
8.4.2 China
8.4.3 India
8.4.4 Australia
8.4.5 New Zealand
8.4.6 South Korea
8.4.7 Rest of Asia Pacific
8.5 South America
8.5.1 Argentina
8.5.2 Brazil
8.5.3 Chile
8.5.4 Rest of South America
8.6 Middle East & Africa
8.6.1 Saudi Arabia
8.6.2 UAE
8.6.3 Qatar
8.6.4 South Africa
8.6.5 Rest of Middle East & Africa
9 Key Developments
9.1 Agreements, Partnerships, Collaborations and Joint Ventures
9.2 Acquisitions & Mergers
9.3 New Product Launch
9.4 Expansions
9.5 Other Key Strategies
10 Company Profiling
10.1 T-M Vacuum Products, Inc.
10.2 Lam Research Corporation
10.3 Sentech Instruments GmbH
10.4 Advanced Energy Industries, Inc.
10.5 Plasma Etch, Inc.
10.6 Muegge GmbH
10.7 PIE Scientific LLC.
10.8 ADTEC Plasma Technology Co., Ltd.
10.9 Rave Scientific
10.10 PVA TePla AG
10.11 MKS Instruments.
10.12 Samco Inc.
10.13 Oxford Instruments plc
10.14 XEI Scientific, Inc.
List of Tables
Table 1 Global Remote Plasma Source Market Outlook, By Region (2021-2030) ($MN)
Table 2 Global Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 3 Global Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 4 Global Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 5 Global Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 6 Global Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 7 Global Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 8 Global Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 9 Global Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 10 Global Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 11 Global Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 12 Global Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 13 Global Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 14 Global Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 15 Global Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 16 Global Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 17 Global Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 18 Global Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 19 Global Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 20 Global Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 21 Global Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 22 Global Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 23 Global Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 24 Global Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 25 North America Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 26 North America Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 27 North America Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 28 North America Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 29 North America Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 30 North America Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 31 North America Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 32 North America Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 33 North America Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 34 North America Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 35 North America Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 36 North America Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 37 North America Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 38 North America Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 39 North America Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 40 North America Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 41 North America Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 42 North America Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 43 North America Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 44 North America Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 45 North America Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 46 North America Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 47 North America Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 48 North America Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 49 Europe Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 50 Europe Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 51 Europe Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 52 Europe Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 53 Europe Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 54 Europe Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 55 Europe Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 56 Europe Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 57 Europe Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 58 Europe Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 59 Europe Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 60 Europe Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 61 Europe Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 62 Europe Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 63 Europe Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 64 Europe Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 65 Europe Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 66 Europe Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 67 Europe Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 68 Europe Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 69 Europe Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 70 Europe Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 71 Europe Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 72 Europe Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 73 Asia Pacific Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 74 Asia Pacific Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 75 Asia Pacific Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 76 Asia Pacific Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 77 Asia Pacific Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 78 Asia Pacific Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 79 Asia Pacific Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 80 Asia Pacific Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 81 Asia Pacific Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 82 Asia Pacific Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 83 Asia Pacific Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 84 Asia Pacific Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 85 Asia Pacific Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 86 Asia Pacific Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 87 Asia Pacific Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 88 Asia Pacific Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 89 Asia Pacific Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 90 Asia Pacific Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 91 Asia Pacific Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 92 Asia Pacific Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 93 Asia Pacific Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 94 Asia Pacific Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 95 Asia Pacific Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 96 Asia Pacific Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 97 South America Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 98 South America Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 99 South America Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 100 South America Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 101 South America Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 102 South America Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 103 South America Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 104 South America Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 105 South America Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 106 South America Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 107 South America Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 108 South America Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 109 South America Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 110 South America Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 111 South America Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 112 South America Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 113 South America Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 114 South America Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 115 South America Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 116 South America Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 117 South America Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 118 South America Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 119 South America Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 120 South America Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
Table 121 Middle East & Africa Remote Plasma Source Market Outlook, By Country (2021-2030) ($MN)
Table 122 Middle East & Africa Remote Plasma Source Market Outlook, By Type (2021-2030) ($MN)
Table 123 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Plasma Cleaner (2021-2030) ($MN)
Table 124 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Plasma Processor (2021-2030) ($MN)
Table 125 Middle East & Africa Remote Plasma Source Market Outlook, By Capacitively Coupled Plasma (CCP) (2021-2030) ($MN)
Table 126 Middle East & Africa Remote Plasma Source Market Outlook, By Inductively Coupled Plasma (ICP) (2021-2030) ($MN)
Table 127 Middle East & Africa Remote Plasma Source Market Outlook, By Remote Microwave Plasma (2021-2030) ($MN)
Table 128 Middle East & Africa Remote Plasma Source Market Outlook, By Other Types (2021-2030) ($MN)
Table 129 Middle East & Africa Remote Plasma Source Market Outlook, By Application (2021-2030) ($MN)
Table 130 Middle East & Africa Remote Plasma Source Market Outlook, By Semiconductor Manufacturing (2021-2030) ($MN)
Table 131 Middle East & Africa Remote Plasma Source Market Outlook, By Thin Film Deposition (2021-2030) ($MN)
Table 132 Middle East & Africa Remote Plasma Source Market Outlook, By Surface Treatment (2021-2030) ($MN)
Table 133 Middle East & Africa Remote Plasma Source Market Outlook, By CVD (Chemical Vapor Deposition) (2021-2030) ($MN)
Table 134 Middle East & Africa Remote Plasma Source Market Outlook, By ALD (Atomic Layer Deposition)/LPCVD (Low Pressure Chemical Vapor Deposition) (2021-2030) ($MN)
Table 135 Middle East & Africa Remote Plasma Source Market Outlook, By Etch (2021-2030) ($MN)
Table 136 Middle East & Africa Remote Plasma Source Market Outlook, By Other Applications (2021-2030) ($MN)
Table 137 Middle East & Africa Remote Plasma Source Market Outlook, By End User (2021-2030) ($MN)
Table 138 Middle East & Africa Remote Plasma Source Market Outlook, By Electronics & Semiconductor industry (2021-2030) ($MN)
Table 139 Middle East & Africa Remote Plasma Source Market Outlook, By Healthcare Industry (2021-2030) ($MN)
Table 140 Middle East & Africa Remote Plasma Source Market Outlook, By Manufacturing Industry (2021-2030) ($MN)
Table 141 Middle East & Africa Remote Plasma Source Market Outlook, By Optics (2021-2030) ($MN)
Table 142 Middle East & Africa Remote Plasma Source Market Outlook, By Textile Industry (2021-2030) ($MN)
Table 143 Middle East & Africa Remote Plasma Source Market Outlook, By Chemical (2021-2030) ($MN)
Table 144 Middle East & Africa Remote Plasma Source Market Outlook, By Other End Users (2021-2030) ($MN)
| ※参考情報 リモートプラズマソース（Remote Plasma Source）は、半導体製造や表面処理、材料科学などの分野で広く利用される技術です。通常、プラズマは電気エネルギーを用いてガスをイオン化することで生成されますが、リモートプラズマソースは、プラズマを直接対象物に接触させるのではなく、生成したプラズマを遠方から送信して利用します。これにより、厚膜や薄膜の形成、エッチング、表面改質などが行われます。 リモートプラズマソースの主な種類には、高周波（RF）プラズマソース、マイクロ波プラズマソース、直流（DC）プラズマソースの3つがあります。高周波プラズマソースは、一般的に13.56 MHzの周波数を使用し、イオン生成効率が高く、均一なプラズマを形成できます。一方、マイクロ波プラズマソースは、2.45 GHzや915 MHzの周波数を利用して、高エネルギーのプラズマを形成します。これにより、異なる特性のプラズマを生成でき、多様なアプリケーションに対応可能です。直流プラズマソースは、比較的簡単な構造で、低エネルギーのプロセスに用いられます。 リモートプラズマソースの主な目的は、プラズマで生成した反応性種を材料に接触させることで、化学反応を促進したり、物理的特性を改善したりすることです。特に半導体業界では、薄膜作成やエッチングプロセスに活用されます。薄膜形成プロセスでは、リモートプラズマを利用して、被覆する材料の密着性や品質を向上させることができます。また、エッチングでは、必要な形状を微細に加工するために、プラズマから発生する反応性種を用いて表面を選択的に削ることが可能です。 さらに、リモートプラズマソースは、生体材料の改質やコーティング、農業用材料の表面処理など、さまざまな用途においても利用されています。医療分野では、バイオマテリアルの表面を改質し、細胞接着や細胞増殖を促進するために応用されることがあります。また、農業では、農薬や肥料の表面処理を行うことで、効果的な成分の放出を確保する技術として注目されています。 リモートプラズマソースの関連技術には、プラズマモニタリングや制御技術、そしてプラズマ生成装置の設計・改良などがあります。プラズマの特性をリアルタイムで把握するためのセンサーやモニタリングシステムが導入されており、これによりプロセスの最適化や品質管理が可能になります。また、プラズマを効率よく生成するための新しい材料や構造が研究されており、さらなる性能向上が期待されています。 リモートプラズマソースを使用する際のメリットとしては、プロセスの柔軟性、高均一性、低温プロセスが挙げられます。これにより、敏感な材料や複雑な形状の部品に対しても適用が容易になります。一方で、限られた条件下での反応性種の制御が課題となることもあります。したがって、より効果的なプロセスを確立するためには、技術の進化とともに新しいアイデアやアプローチが求められています。 このように、リモートプラズマソースは多様な分野での応用が見込まれ、今後も技術の発展が期待されています。これを駆使することで、さらに新しい材料やプロセスの開発が進み、産業界全体に対して大きな影響を与える可能性があります。 |
